Electronics and Photonics

Session 127 - Topics in Plasma Science and Thin Film Applications II- in Honor of Herbert H. Sawin
Topics in Plasma Science and Thin Film Applications II - In Honor of Herbert H. Sawin
Chair: Jane P. Chang
CoChair: Sumit Agarwal
  Plasma-Induced Structural Transitions In Materials
Eray S. Aydil, Michael Behr
  Herb Sawin and DuPont: 25 Years of Cooperative Research and Development
Michael Mocella
  Modeling Plasma-Surface Interactions and Their Role in Inducing Structural Transitions
Dimitrios Maroudas
  Reaction Mechanisms in Plasma Etching of High-K Materials
Jane P. Chang
  Reception to AIChE Area 8e Special Symposium
Jane P. Chang

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