Electronics and Photonics

Session 566 - Transport Phenomena In Electronic Materials Processing
Transport Phenomena in Electronic Materials Processing
Chair: W. Robert Ashurst
CoChair: Jeffrey J. Derby
  Explanation for Benefits of Millisecond Annealing In Ultrashallow Junction Formation
Edmund G. Seebauer, Charlotte T. M. Kwok
  The Combined Role of Transport Phenomena and Interfacial Attachment Kinetics during Liquid Phase Epitaxy of Mercury Cadmium Telluride
Igal G. Rasin, Anne Ben Dov, Ilana Grimberg, Olga Klin, Eliezer Weiss, Simon Brandon
  First Principles Determination of Highly Mobile Dopant-Interstitial Complexes and Their Relative Contribution to Dopant Diffusion In Silicon
Kyoung E. Kweon, Gyeong S. Hwang
  Computational Insights into the (Complex) Aggregation Physics of Self-Interstitials
Sumeet Kapur, Talid Sinno
  A Comprehensive Model for Coupled Oxide Precipitation and Point Defect Aggregation In Crystalline Silicon
Rubal Dua, Talid Sinno
  Optically Stimulated Diffusion In Ultrashallow Junction Formation
Yevgeniy Kondratenko, Charlotte Kwok, Edmund G. Seebauer
  Morphological Stability Analysis of Planar Crystalline Solid Surfaces Under the Simultaneous Action of Electric Fields and Mechanical Stresses
Vivek Tomar, M. Rauf Gungor, Dimitrios Maroudas

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