Session 736 - Micro- and Nanofabricated Sensors I


Topical 9: Sensors
Session 736 - Micro- and Nanofabricated Sensors I
This session will focus on micro and nanosensors, with specific emphasis on the fabrication approaches and unique applications. Silicon-based MEMS fabrication technology and its potential and limitations for microsensor development will be addressed in this session. The incorporation of sensors into sensor arrays or other forms of sensor integration into micro and nanosystems are also of interest. Advances in non-planar, non-silicon based fabrication strategies, including nanotube or nanoelectrode configurations as microsensors or microdetection systems will be a focus.
Chair:	Heidi B. Martin
	736a	Engineering Nanoscopic Tunnel Junctions for Single Molecule Detection Rahul Gupta, Brian G. Willis
	736b	Robust Piezoelectric-Excited Millimeter-Sized Cantilever Sensors for Detecting Pathogens David Maraldo, Kishan Rijal, Raj Mutharasan
	736c	Optimization of a Multi-Phase Sensor for Detection of Phosphonates In Air ChElsea N. Monty, Ilwhan Oh, Rich I. Masel
	736d	Fabrication and Control of Nanopore Devices for Ultra-Rapid Biomolecule Analysis Applications Amir A. Ahmadi, Peter J. Hesketh, Abhijit Chatterjee, Sankar Nair
	736e	Integration of Reactive Polymeric Nanofilms into a Low-Power Microelectromechanical Switch Wyatt E. Tenhaeff, William J. Arora, George Barbastathis, Karen K. Gleason
	736f	Numerical Analysis of High Frequency Surface Acoustic Wave ChEmical and Biological Sensors Based on Multilayered Diamond/Aln/LiNbO3 Substrates Subramanian K.R.S. Sankaranarayanan, Stefan Cular, Venkat Bhethanabotla
	736g	Templated Periodic Metallic Nanostructures as Efficient SERS Substrates for Biosensing Nicholas Linn, Tzung-Hua Lin, Peng Jiang

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