MEMS-fabricated Gyroscopes with Feedback Compensation
| Authors: | Cho Dong-il, Seoul National University, Korea, Republic of
Park Yonghwa, Seoul National University, Korea, Republic of
Park Sangjun, Seoul National University, Korea, Republic of
Choi Byungdoo, Seoul National University, Korea, Republic of
Ko Hyoungho, Seoul National University, Korea, Republic of
Song Taeyong, Seoul National University, Korea, Republic of
Lim Geunwon, Seoul National University), Korea, Republic of |
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| Topic: | 4.1 Components and Instruments |
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| Session: | Micro-Electro-Mechanical Systems |
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| Keywords: | Gyroscopes, Performance limits, Feedback control, Modelling, Simulation |
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Abstract
This paper presents a lead-lag compensator design for a MEMS-fabricated microgyroscope. The microgyroscope is basically a high Q system, thus the bandwidth is limited to be narrow. To overcome the open-loop performance limitations, a feedback controller is designed to improve the resolution, bandwidth, linearity, and bias stability of the microgyroscope. The feedback controller is applied to the z-axis microgyroscope fabricated by SBM process. In MATLAB simulations, resolution, bandwidth, input range, and bias stability of closed-loop system are improved from 0.0021 deg/sec to 0.0013 deg/sec, from 14.8 Hz to 115 Hz, from ±50 deg/sec to ±200 deg/sec, and from 0.0249 deg/sec to 0.0028 deg/sec, respectively.
